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Development of real-time plasma monitoring method using AC driven electrostatic probe : 교류전위를 인가한 정전탐침을 이용한 실시간 플라즈마 진단법 개발
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- Authors
- Advisor
- 김곤호
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 정전 탐침 ; electrical probe ; 랭뮈어 탐침 ; Langmuir probe ; 부유 탐침 ; floating probe ; 쉬스 저항 ; floating potential ; 쉬스 정전용량 ; sheath resistance ; 인가 주파수 ; sheath capacitance ; 맥스웰 분포 ; bias frequency ; 드류베스틴 분포 ; Maxwellian distribution ; 원통형 탐침 ; Druyvesteyn distribution ; cylindrical probe
- Description
- Thesis(masters) --서울대학교 대학원 :에너지시스템공학부,2009.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038821
https://hdl.handle.net/10371/43580
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