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열플라즈마를 이용한 비정질 실리콘 박막의 결정화 실험
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- Authors
- Advisor
- 홍상희
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 열플라즈마 ; thermal plasma ; 실리콘 박막 ; silicon thin film ; 급속열처리법 ; poly-crystalline ; 다결정 ; crystallization ; 결정화 ; anode nozzle ; 결정화 공정조건
- Description
- 학위논문(석사) --서울대학교 대학원 :에너지시스템공학부,2008.8.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042305
https://hdl.handle.net/10371/43615
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