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Study on etching characteristics and mechanism using the blower type atmospheric pressure plasma
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- Authors
- Advisor
- 김곤호
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 분사형 ; blower type atmospheric pressure plasma ; 대기압 플라즈마 ; atmospheric pressure plasma ; 유전체 격벽 플라즈마 ; dielectric barrier discharge ; 비정질 실리콘 ; chemically active species ; 비정질 실리콘 식각 ; amorphous silicon (a-Si) ; 식각 공정 ; a-Si etching ; 식각 반응 ; etching process ; TFT-LCD ; effective reaction time ; 대기압 플라즈마 ; TFT-LCD
- Description
- 학위논문(석사) --서울대학교 대학원 :에너지시스템공학부,2008.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039731
https://hdl.handle.net/10371/44228
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