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Wavelet 변환을 이용한 파장 주사 간섭계에서의 박막 두께 형상 측정 : Thin-film thickness profile measurement using wavelet transform in wavelength scanning interferometry
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- Authors
- Advisor
- 박희재
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 투명 박막 ; Transparent Thin Film ; 형상 측정 ; Wavelength Scanning Interferometry ; 파장 주사 간섭계 ; AOTF(Acousto-Optic Tunable Filter) ; 음향광학변조필터(AOTF) ; Wavelet Transform ; Wavelet 변환 ; Phase Retrieval ; 위상 복원
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052268
https://hdl.handle.net/10371/44334
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