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연속체 가정을 통한 나노 임프린트 리소그래피 공정 해석
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- Authors
- Advisor
- 이우일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 나노 임프린트 리소그래피(NIL) ; Nano-imprint-lithography ; 수치해석 ; Numerical simulation ; 표면 장력 ; Surface tension ; 접촉각 ; Contact angle ; 슬립(slip) ; Slip ; 핫엠보싱(hot-embossing) ; Hot-embossing experiment
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056274
https://hdl.handle.net/10371/44465
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