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Ti gettering을 이용한 MEMS Resonator의 진공도에 대한 고찰 : (A) Study of the Vacuum Level for the MEMS Resonator using Ti Gettering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 조동일 | - |
| dc.contributor.author | 최태영 | - |
| dc.date.accessioned | 2010-01-26T06:12:16Z | - |
| dc.date.available | 2010-01-26T06:12:16Z | - |
| dc.date.copyright | 2009. | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038739 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/44680 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2009.8. | ko |
| dc.format.extent | vii, 74장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | Micro Electro Mechanical System(MEMS) | ko |
| dc.subject | Micro Electro Mechanical System (MEMS) | ko |
| dc.subject | 진공도 | ko |
| dc.subject | Ti getter | ko |
| dc.subject | Ti getter | ko |
| dc.subject | Vacuum package | ko |
| dc.subject | 진공 실장 | ko |
| dc.title | Ti gettering을 이용한 MEMS Resonator의 진공도에 대한 고찰 | ko |
| dc.title.alternative | (A) Study of the Vacuum Level for the MEMS Resonator using Ti Gettering | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Master | ko |
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