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(A) Study on Nano Beam Fabrication for RF Filter Applications : RF 여파기용 나노 빔 제작에 대한 연구
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- Authors
- Advisor
- 김용권
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 나노 빔 공진기 ; vertical nano beam resonator ; RF MEMS 여파기 ; high frequency ; 자가 정렬 마스크 ; RF MEMS filter ; 뒷면 노광 ; self-aligned mask ; modified CPW line
- Description
- Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037066
https://hdl.handle.net/10371/44736
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