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다구치 방법을 이용한 비정질 수정 건식 식각 공정 조건 최적화와 비정질 수정 외팔보의 Q-factor 분석
Optimization for fused quartz DRIE process using taguchi method and Q factor analysis for fused quartz micro cantilever

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Authors
송은석
Advisor
김용권
Issue Date
2009
Publisher
서울대학교 대학원
Keywords
비정질 수정Q factor다구치 방법외팔보 구조물열탄성 댐핑support 댐핑air 댐핑
Description
학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037040

http://hdl.handle.net/10371/44762
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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