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금속 소재 고종횡비 3차원 마이크로 부품의 생산기술 개발

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Authors

권기백

Advisor
김종원
Issue Date
2004
Publisher
서울대학교 대학원
Keywords
SU-8Su-83차원 형상 가공3d fabrication고종횡비High-aspect ratioMEMS-RPMems-rp
Description
학위논문(석사)--서울대학교 대학원 :기계항공공학부,2004.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054364

https://hdl.handle.net/10371/44968
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