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불화탄소 플라즈마에 의한 저유전율 박막의 식각 특성 : Etch characteristics of low dielectric constant materials in fluorocarbon plasmas
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- Authors
- Advisor
- 문상흡
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(박사)--서울대학교 대학원 :응용화학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058226
https://hdl.handle.net/10371/45265
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