Design and synthesis of polysilsesquioxanes with low dielectric and photosensitive characteristics

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Design and synthesis of polysilsesquioxanes with low dielectric and photosensitive characteristics : 저유전 및 광민감 특성을 지닌 폴리실세스퀴옥산 고분자의 설계 및 합성

DC Field	Value	Language
dc.contributor.advisor	차국헌	-
dc.contributor.author	차봉준	-
dc.date.accessioned	2010-01-27	-
dc.date.available	2010-01-27	-
dc.date.copyright	2005.	-
dc.date.issued	2005	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052304	kog
dc.identifier.uri	https://hdl.handle.net/10371/45344	-
dc.description	Thesis(doctor`s)--서울대학교 대학원 :응용화학부,2005.	ko
dc.format.extent	x, 97 leaves	ko
dc.language.iso	ko	ko
dc.publisher	서울대학교 대학원	ko
dc.subject	폴리실세스퀴옥산	ko
dc.subject	Polysilsesquioxane	ko
dc.subject	저유전 박막	ko
dc.subject	low-k thin film	ko
dc.subject	아다만탄	ko
dc.subject	adamantine	ko
dc.subject	기공형성제	ko
dc.subject	porogen	ko
dc.subject	유전상수	ko
dc.subject	dielectric constant	ko
dc.subject	모듈러스	ko
dc.subject	modulus	ko
dc.subject	광패턴	ko
dc.subject	photo-patterning	ko
dc.subject	광분해	ko
dc.subject	photo-decomposition	ko
dc.subject	광산화	ko
dc.subject	photo-oxidation	ko
dc.subject	박막밀도	ko
dc.subject	film density	ko
dc.title	Design and synthesis of polysilsesquioxanes with low dielectric and photosensitive characteristics	ko
dc.title.alternative	저유전 및 광민감 특성을 지닌 폴리실세스퀴옥산 고분자의 설계 및 합성	ko
dc.type	Thesis	-
dc.contributor.department	응용화학부	-
dc.description.degree	Doctor	ko

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