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탄성힌지와 압전소자를 이용한 AFM scanner용 초정밀 XYZ 스테이지 개발
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 박희재 | - |
dc.contributor.author | 김유식 | - |
dc.date.accessioned | 2010-01-27T15:20:54Z | - |
dc.date.available | 2010-01-27T15:20:54Z | - |
dc.date.copyright | 2003. | - |
dc.date.issued | 2003 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059855 | kog |
dc.identifier.uri | https://hdl.handle.net/10371/45653 | - |
dc.description | 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2003. | ko |
dc.format.extent | v, 40 장 | ko |
dc.language.iso | ko | ko |
dc.publisher | 서울대학교 대학원 | ko |
dc.subject | AFM Scanner | ko |
dc.subject | Afm scanner | ko |
dc.subject | 탄성힌지 | ko |
dc.subject | Pzt actuator | ko |
dc.subject | 압전소자구동기 | ko |
dc.subject | Elastic hinge | ko |
dc.subject | 초정밀 위치제어 | ko |
dc.subject | Position control | ko |
dc.subject | 3-DOF Stage | ko |
dc.subject | Coupled motion | ko |
dc.subject | 간섭운동 | ko |
dc.subject | 3-dof stage | ko |
dc.subject | 마이크로 스테이지 | ko |
dc.subject | Micro stage | ko |
dc.title | 탄성힌지와 압전소자를 이용한 AFM scanner용 초정밀 XYZ 스테이지 개발 | ko |
dc.type | Thesis | - |
dc.contributor.department | 기계항공공학부 | - |
dc.description.degree | Master | ko |
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