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탄성힌지와 압전소자를 이용한 AFM scanner용 초정밀 XYZ 스테이지 개발

DC Field Value Language
dc.contributor.advisor박희재-
dc.contributor.author김유식-
dc.date.accessioned2010-01-27T15:20:54Z-
dc.date.available2010-01-27T15:20:54Z-
dc.date.copyright2003.-
dc.date.issued2003-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059855kog
dc.identifier.urihttps://hdl.handle.net/10371/45653-
dc.description학위논문(석사)--서울대학교 대학원 :기계항공공학부,2003.ko
dc.format.extentv, 40 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectAFM Scannerko
dc.subjectAfm scannerko
dc.subject탄성힌지ko
dc.subjectPzt actuatorko
dc.subject압전소자구동기ko
dc.subjectElastic hingeko
dc.subject초정밀 위치제어ko
dc.subjectPosition controlko
dc.subject3-DOF Stageko
dc.subjectCoupled motionko
dc.subject간섭운동ko
dc.subject3-dof stageko
dc.subject마이크로 스테이지ko
dc.subjectMicro stageko
dc.title탄성힌지와 압전소자를 이용한 AFM scanner용 초정밀 XYZ 스테이지 개발ko
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeMasterko
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