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Fabrication of 2-dimensional nanopatterned structures using lithography and particle transport : 리소그래피와 입자전달을 이용한 2차원 나노패턴 구조의 생성에 관한 연구
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- Authors
- Advisor
- 최만수
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 나노패터닝 ; Nanopatterning ; 나노구조물 ; Nanostructure ; 나노입자 ; Nanoparticle ; 나노와이어 ; Nanowire ; 리소그래피 ; Lithography ; 반응성이온식각 ; Sintering ; 소결 ; Reactive ion etching ; 증발 및 응축법 ; Evaporation and condensation method
- Description
- Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058877
https://hdl.handle.net/10371/45666
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