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Micro turbine development based on MEMS technology : MEMS 기술을 이용한 마이크로 터빈 개발
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 송성진 | - |
| dc.contributor.author | 전병선 | - |
| dc.date.accessioned | 2010-01-27T15:22:09Z | - |
| dc.date.available | 2010-01-27T15:22:09Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058566 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/45681 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2003. | en |
| dc.format.extent | ix, 72 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 마이크로 터빈 | en |
| dc.subject | Microturbine | en |
| dc.subject | 마이크로 파워 시스템 | en |
| dc.subject | Micro power system | en |
| dc.subject | 마이크로 가스 베어링 | en |
| dc.subject | Micro gas bearing | en |
| dc.subject | 고형상비 | en |
| dc.subject | High aspect ratio | en |
| dc.subject | DRIE | en |
| dc.subject | Drie | en |
| dc.subject | 실리콘 직접접합법 | en |
| dc.subject | Si direct bonding | en |
| dc.title | Micro turbine development based on MEMS technology | en |
| dc.title.alternative | MEMS 기술을 이용한 마이크로 터빈 개발 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Master | en |
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