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Nanoparticle pattern deposition from the gas phase onto charged flat surface : 하전된 평판위에 기상중 나노입자의 패턴증착
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- Authors
- Advisor
- 최만수
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 나노패터닝 ; Nanopatterning ; 나노제로그래피 ; Nanoxerography ; 나노입자 ; Nanoparticle ; 소프트리소그래피 ; Softlithography ; 나노구조물 ; Nanostructure ; 나노제조 ; Nanofabrication ; 접촉차징 ; Contact charging ; 입자증착 ; Particle deposition
- Description
- Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2003.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057671
https://hdl.handle.net/10371/45727
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