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Design and Fabrication of Highly Reliable Poly-Si TFT by Magnetic Field Enhanced RTA Crystallization : 자계유도 급속열처리 결정화에 의한 고신뢰성 다결정 실리콘 박막 트랜지스터의 설계 및 제작
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- Authors
- Advisor
- 한민구
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 다결정 실리콘 박막 트랜지스터 ; polycrystalline silicon thin film transistor (poly-Si TFT) ; 다결정 실리콘 박막 ; polycrystalline silicon film ; 교류자계유도 금속열처리 ; alternating magnetic-field-enhanced rapid thermal annealing (AMFERTA)
- Description
- Thesis(doctors) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000036072
https://hdl.handle.net/10371/46864
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