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광 리소그래피에서 타원 편광 효과를 이용한 마스크 최적화 연구
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- Authors
- Advisor
- 이성묵
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :과학교육과 물리전공,1996.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000080742
https://hdl.handle.net/10371/49834
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