SHERP

광 리소그래피에서 타원 편광 조명법에 의한 상의 계산과 결상 교수법 연구
Calculations on image for the elliptical polarization in photolithography and study for the instruction of imaging

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Authors
전성호
Advisor
이성묵
Issue Date
1996
Publisher
서울대학교 대학원
Keywords
광리소그래피photolithography결상이론partial coherence theory위상변위마스크PSM변형조명OAI선편광조명vector diffraction theory
Description
학위논문(박사)--서울대학교 대학원 :과학교육과 물리전공,1996.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081722

http://hdl.handle.net/10371/50329
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College of Education (사범대학)Dept. of Science Education (과학교육과)Physics (물리전공)Theses (Ph.D. / Sc.D._물리전공)
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