Publications
Detailed Information
광 리소그래피에서 타원 편광 조명법에 의한 상의 계산과 결상 교수법 연구 : Calculations on image for the elliptical polarization in photolithography and study for the instruction of imaging
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 이성묵
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Keywords
- 광리소그래피 ; photolithography ; 결상이론 ; partial coherence theory ; 위상변위마스크 ; PSM ; 변형조명 ; OAI ; 선편광조명 ; vector diffraction theory
- Description
- 학위논문(박사)--서울대학교 대학원 :과학교육과 물리전공,1996.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081722
https://hdl.handle.net/10371/50329
- Files in This Item:
- There are no files associated with this item.
- Appears in Collections:
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.