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유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석 : Characterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor deposition
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- Authors
- Advisor
- 김형준
- Issue Date
- 1998
- Publisher
- 서울대학교 대학원
- Keywords
- (Ba,Sr)TiO3 ; thin film ; 박막 ; metallorganic chemical vapor deposition ; Pt ; electrode ; RuO2 ; 유기금속 화학증착법
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1998.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076533
https://hdl.handle.net/10371/50773
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