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유기금속 화학증착법으로 제조된 고유전율 박막용 Pt 및 RuO₂전국의 특성분석
Characterization of Pt and RuO₂electrodes for high dielectric thin films prepared by metallorganic chemical vapor deposition

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Authors
이종명
Advisor
김형준
Issue Date
1998
Publisher
서울대학교 대학원
Keywords
(Ba,Sr)TiO3thin film박막metallorganic chemical vapor depositionPtelectrodeRuO2유기금속 화학증착법
Description
학위논문(박사)--서울대학교 대학원 :무기재료공학과,1998.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076533

http://hdl.handle.net/10371/50773
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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