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원격플라즈마 유기금속화학증착법에 의한 저온 GaN 박막 성장 및 플라즈마 발광 특성 분석 : Low-temperature growth of GaN thin films by remote plasma-enhanced metal-organic chemical vapor deposition and optical emission characterization of plasma
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- Authors
- Advisor
- 윤의준
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- GaN ; remote plasma-enhanced metal-organic chemical vapor deposition ; 원격플라즈마 유기금속화학증착법 ; optical emission spectroscopy ; 광학발광분광법 ; low temperature growth ; 저온 성장 ; GaN buffer layer ; 질소 플라즈마 ; nitrogen plasma
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079654
https://hdl.handle.net/10371/50785
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