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스퍼터링법에 의한 YBa₂Cu₃3O7-x 박막 제조 및 초전도 디지털 소자 응용 : Fabrication of YBa₂Cu₃3O7-x thin film by using rf sputtering and its application to superconducting digital device
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- Authors
- Advisor
- 박순자
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Keywords
- off-axis rf 마그네트론 스퍼터링 ; off-axis rf magnetron sputtering ; YBa2Cu3O7-x 박막 ; YBa2Cu3O7-x thin films ; 산소 분압 ; oxygen partial pressure ; 분광법 ; optical emission spectroscopy ; 단자속 양자 회로 ; single flux quantum logic circuit
- Description
- 학위논문(박사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079653
https://hdl.handle.net/10371/50786
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