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Cu 배선공정에서 확산방지막으로서 TiN 박막에 대한 연구 : A Study on the TiN thin film as a diffusion barrier in Cu metallizaition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 박기철 | - |
| dc.date.accessioned | 2010-02-05T06:42:19Z | - |
| dc.date.available | 2010-02-05T06:42:19Z | - |
| dc.date.copyright | 1998. | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076518 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/50832 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1998. | ko |
| dc.format.extent | x, 137 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | TiN | ko |
| dc.subject | Cu | ko |
| dc.subject | 구리 | ko |
| dc.subject | Al | ko |
| dc.subject | 알루미늄 | ko |
| dc.subject | diffusion barrier | ko |
| dc.subject | 확산 방지막 | ko |
| dc.subject | ion beam | ko |
| dc.subject | 이온빔 | ko |
| dc.subject | plasma | ko |
| dc.title | Cu 배선공정에서 확산방지막으로서 TiN 박막에 대한 연구 | ko |
| dc.title.alternative | A Study on the TiN thin film as a diffusion barrier in Cu metallizaition | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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