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이온플레이팅법으로 제조된 (Ti,Al)N박막의 미세구조 및 특성에 관한 연구
Microstructures and properties of (Ti,Al)N thin film prepared by ion plating

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Authors
이인행
Advisor
이정중
Issue Date
1997
Publisher
서울대학교 대학원
Keywords
이온플레이팅(Ti,Al)N미세조직ion platingAl함량microstructure농도경사residual stress접착력adhesion
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1997.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079632

http://hdl.handle.net/10371/50850
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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