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ZMR법에 의한 실리콘 박막의 단결정화 과정의 해석과 박막 트랜지스터에의 응용
Analysis of single crystallization process of silicon thin films by ZMR method and its application to thin film transistor

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Authors
이시우
Advisor
주승기
Issue Date
1996
Publisher
서울대학교 대학원
Keywords
실리콘silicon할로겐 램프SOI전산모사ZMR계면 안정성halogen lamp복사과냉computer simulation
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1996.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000081625

http://hdl.handle.net/10371/50867
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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