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RF 마그네트론 스퍼터링법으로 제조한 permalloy (NiFe) 박막의 내부 응력 및 자기적 성질
The Internal stress and magnetic properties of permalloy (NiFe) thin films manufactured by RF magnetron sputtering method

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Authors
김현태
Advisor
김상주
Issue Date
1995
Publisher
서울대학교 대학원
Keywords
soft magnetic properties연자성thin film박막target타게트deposition rate중착속도composition of thin film박막조성
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1995.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000085082

http://hdl.handle.net/10371/50876
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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