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RF 마그네트론 스퍼터링법으로 제조한 permalloy (NiFe) 박막의 내부 응력 및 자기적 성질 : The Internal stress and magnetic properties of permalloy (NiFe) thin films manufactured by RF magnetron sputtering method
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- Authors
- Advisor
- 김상주
- Issue Date
- 1995
- Publisher
- 서울대학교 대학원
- Keywords
- soft magnetic properties ; 연자성 ; thin film ; 박막 ; target ; 타게트 ; deposition rate ; 중착속도 ; composition of thin film ; 박막조성
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1995.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000085082
https://hdl.handle.net/10371/50876
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