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실리콘계 박막제조 공정에서 열 및 물질전달과 입자역학에 관한 연구 : Studies of heat, mass transfer and particle dynamics during silicon-based thin film fabrication processes
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최만수 | - |
| dc.contributor.author | 박경순 | - |
| dc.date.accessioned | 2010-02-08T06:03:21Z | - |
| dc.date.available | 2010-02-08T06:03:21Z | - |
| dc.date.copyright | 1997. | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000079638 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/51868 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :기계공학과,1997. | ko |
| dc.format.extent | xiii, 111 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 화학증착공정 | ko |
| dc.subject | chemical vapor deposition | ko |
| dc.subject | 수정된 화학증착공정 | ko |
| dc.subject | modified chemical vapor deposition | ko |
| dc.subject | 저압화학증착공정 | ko |
| dc.subject | low pressure chemical vapor deposition | ko |
| dc.subject | 입자역학방정식 | ko |
| dc.subject | general dynamic equation | ko |
| dc.subject | 구간해석방법 | ko |
| dc.subject | sectional method | ko |
| dc.title | 실리콘계 박막제조 공정에서 열 및 물질전달과 입자역학에 관한 연구 | ko |
| dc.title.alternative | Studies of heat, mass transfer and particle dynamics during silicon-based thin film fabrication processes | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계공학과 | - |
| dc.description.degree | Doctor | ko |
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