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초고진공 전자 공명 화학기상증착법에 의한 LOCOS 형성된 기판에 저온 실리콘 에피막 성장에 관한 연구

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Authors
여환국
Advisor
윤의준
Issue Date
1997
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,1997.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000078848

http://hdl.handle.net/10371/52039
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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