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플라즈마 화학기상증착법에 의한 불소가 첨가된 산화막의 증착 및 특성에 관한 연구
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- Authors
- Advisor
- 김형준
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :무기재료공학과,1997.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000078829
https://hdl.handle.net/10371/52048
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