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TiCl₄와 NH₃를 사용하여 화학증착된 TiN의 접착력에 관한 연구

DC Field Value Language
dc.contributor.advisor이정중-
dc.contributor.author박종익-
dc.date.accessioned2010-02-08T07:51:32Z-
dc.date.available2010-02-08T07:51:32Z-
dc.date.copyright1995.-
dc.date.issued1995-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000083591kog
dc.identifier.urihttp://hdl.handle.net/10371/52225-
dc.description학위논문(석사)--서울대학교 대학원 :금속공학과 제련공학전공,1995.ko
dc.format.extentiii, 42 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.titleTiCl₄와 NH₃를 사용하여 화학증착된 TiN의 접착력에 관한 연구ko
dc.typeThesis-
dc.contributor.department금속공학과 제련공학전공-
dc.description.degreeMasterko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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