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증착 조건에 따른 비정질 Si 박막의 미세 구조와 고상 결정화 거동

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Authors

황석민

Advisor
김기범
Issue Date
1998
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과 재료전공,1998.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075538

https://hdl.handle.net/10371/52229
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