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The soft magnetic properties of asdeposited Fe-Hf-C-N films and Fe-Hf-N films by N₂reactive RF magneetron sputtering : 질소 반응성 RF 마그네트론 스퍼터링에 의해 제조된 증착상태의 Fe-Hf-C-N 박막과 Fe-Hf-N 박막의 연자기 특성
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이정중 | - |
dc.contributor.author | 송재용 | - |
dc.date.accessioned | 2010-02-08T07:52:12Z | - |
dc.date.available | 2010-02-08T07:52:12Z | - |
dc.date.copyright | 1998. | - |
dc.date.issued | 1998 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075599 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/52239 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :금속공학과 재료공학전공,1998. | en |
dc.format.extent | vi, 47 p. | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.title | The soft magnetic properties of asdeposited Fe-Hf-C-N films and Fe-Hf-N films by N₂reactive RF magneetron sputtering | en |
dc.title.alternative | 질소 반응성 RF 마그네트론 스퍼터링에 의해 제조된 증착상태의 Fe-Hf-C-N 박막과 Fe-Hf-N 박막의 연자기 특성 | - |
dc.type | Thesis | - |
dc.contributor.department | 금속공학과 재료공학전공 | - |
dc.description.degree | Master | en |
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