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구리의 저온 플라즈마 식각을 위한 CuClx의 성장기구에 대한 연구

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Authors
김유창
Advisor
김기범
Issue Date
1995
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과 재료공학전공,1995.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000083578

http://hdl.handle.net/10371/52267
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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