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Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate

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Authors

Kang, T. D.; Lee, Hosun; Park, Won-Il; Yi, Gyu-Chul

Issue Date
2004-01
Publisher
한국물리학회 = The Korean Physical Society
Citation
J. Korean Phys. Soc. 44, 129 (2004)
Keywords
ZnODielectric functionEllipsometryCritical pointHolden model
Abstract
We grew ZnO and Zn1-xMgxO thin films on (0001) sapphire substrates by using metal-organic vapor phase epitaxy and measured the pseudo-dielectric functions using variable-angle spectroscopic ellipsometry. We analyzed the pseudo-dielectric functions by using the multi-layer model. The dielectric functions were fitted by using a Holden model dielectric function. We used anisotropic layer modeling for the ZnO thin film, whereas we adopted the approximation of isotropic layer modeling for the Zn1-xMgxO alloys. We also discuss the Mg composition dependence of the bandgap and the binding energy in Zn1-xMgxO alloys, and consider the valence-band ordering in ZnO thin films.
ISSN
0374-4884
Language
English
URI
http://kiss.kstudy.com/search/detail_view.asp?key=2138270

https://hdl.handle.net/10371/5421

http://www.kps.or.kr
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