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Carrier density dynamics in semiconductors and oxides studied by scanning capactiance microscopy : 주사형 전기용량 현미경을 이용한 반도체와 산화막 내의 동역학적 전하거동 연구
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- Authors
- Advisor
- 국양
- Issue Date
- 1998
- Publisher
- 서울대학교 대학원
- Keywords
- 주사형 전기용량 현미경(SCM) ; scanning capacitance microscopy (SCM) ; S-V ; dopant profile ; 불순물 농도 분포 ; electron and hole trap ; 전하트랩 ; detrapping dynamics ; 동역학적 전하 거동
- Description
- Thesis (doctoral)--서울대학교 대학원 :물리학과,1998.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000076298
https://hdl.handle.net/10371/55885
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