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AlGaAs lateral wet thermal oxidation by closed oxidation system : 폐관 산화법에 의한 AlGaAs의 측면 산화에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 최병두 | - |
dc.contributor.author | 박시현 | - |
dc.date.accessioned | 2010-02-22 | - |
dc.date.available | 2010-02-22 | - |
dc.date.copyright | 1998. | - |
dc.date.issued | 1998 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075277 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/56050 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :물리학과,1998. | en |
dc.format.extent | x, 73 p. | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.title | AlGaAs lateral wet thermal oxidation by closed oxidation system | en |
dc.title.alternative | 폐관 산화법에 의한 AlGaAs의 측면 산화에 관한 연구 | - |
dc.type | Thesis | - |
dc.contributor.department | 물리학과 | - |
dc.description.degree | Master | en |
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