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AlGaAs lateral wet thermal oxidation by closed oxidation system : 폐관 산화법에 의한 AlGaAs의 측면 산화에 관한 연구

DC Field Value Language
dc.contributor.advisor최병두-
dc.contributor.author박시현-
dc.date.accessioned2010-02-22-
dc.date.available2010-02-22-
dc.date.copyright1998.-
dc.date.issued1998-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075277eng
dc.identifier.urihttps://hdl.handle.net/10371/56050-
dc.descriptionThesis (master`s)--서울대학교 대학원 :물리학과,1998.en
dc.format.extentx, 73 p.en
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.titleAlGaAs lateral wet thermal oxidation by closed oxidation systemen
dc.title.alternative폐관 산화법에 의한 AlGaAs의 측면 산화에 관한 연구-
dc.typeThesis-
dc.contributor.department물리학과-
dc.description.degreeMasteren
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