Low Dielectric Nanoporous Poly(methylsilsesquioxane) (PMSSQ) Films via Inorganic/Organic Hybrids

Abstract

Two types of methylsilsesquioxanes (MSSQ) were used as base matrix materials for nanoporous films. The hydrophilicity of MSSQ was controlled by copolymerization for the improved miscibility between MSSQs and star-shaped poly(caprolactone) (PCL) as a porogen. Linear relationship holds between porosity/refractive index and vol% of porogen upto 30%. Dielectric constant of porous MSSQ film could be reduced to 2.2 at the porosity of 30 vol%. Dielectric constant was very sensitive to the content of hydroxyl group of MSSQ and the the latter was reduced by treating surface silanols with hexamethyldisilazane