SHERP

Numerical simulation of Cu MOCVD in a single - wafer reactor
단웨이퍼 반응기에서 유기금속화학증착에 의한 구리박막 성장의 수치 모사

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Authors
김백만
Advisor
이홍희
Issue Date
1996
Publisher
서울대학교 대학원
Description
Thesis (master`s)--서울대학교 대학원 :화학공학과,1996.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082091

http://hdl.handle.net/10371/59007
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Theses (Master's Degree_화학생물공학부)
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