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Numerical simulation of Cu MOCVD in a single - wafer reactor : 단웨이퍼 반응기에서 유기금속화학증착에 의한 구리박막 성장의 수치 모사
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- Authors
- Advisor
- 이홍희
- Issue Date
- 1996
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :화학공학과,1996.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000082091
https://hdl.handle.net/10371/59007
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