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구리 MOCVD에 대한 새로운 개념 : 촉매 및 계면활성제로서의 요오드 흡착제 : Novel concept in Cu MOCVD : iodine adsorbate as a catalytic surfactant
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- Authors
- Advisor
- 이지화
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Keywords
- 구리박막 ; copper thin film ; 금속-유기 화학기상증착 ; metal-organic chemical vapor deposition (MOVD) ; 요오드 ; iodine ; 촉매 ; catalyst ; 계면활성제 ; surfactant
- Description
- 학위논문(박사)--서울대학교 대학원 :공업화학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000074107
https://hdl.handle.net/10371/59517
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