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Issue DateTitle / Author(s) / CitationFileAltmetrics
2005-03
Effects of Pd activation on the self annealing of electroless copper deposition using Co(II)-ethylenediamine as a reducing agent

Lee, Chang Hwa; Kim, Jae Jeong

Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 23(2), 475-479

DOI
1