S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Electrical and Computer Engineering (전기·정보공학부) Journal Papers (저널논문_전기·정보공학부)
다중 양자 우물 구조의 상호 섞임 현상을 이용한 광도파로의 제작
Fabrication of optical waveguide using multi-quantum well intermixing
- 여덕호; 윤경훈; 김성준
- Issue Date
- 제6회 광전자공학학술회의, ThB1, p103, 광주과학기술원, 1999년 5월
- We have fabricated optical waveguide using intermixing of InGaAs/InGaAsP multi-quantum well (MQW) structure. As-grown epi layer had very large absorption coefficient at the wavelength of 1.55㎛, however, after intermixing of the MQW the propagation loss has greatly reduced. Intermixing was done by heat treatment after deposition of SiO2 dielectric material on the sample and the optical waveguide was made by reactive ion etching using CH4/H2 mixture. For the waveguide after 800℃, 30sec heat treatment, the measured propagation loss was 3.76dB/cm and 3.95dB/cm for TE and TM mode respectively.