SHERP

다중 양자 우물 구조의 상호 섞임 현상을 이용한 광도파로의 제작
Fabrication of optical waveguide using multi-quantum well intermixing

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Authors
여덕호; 윤경훈; 김성준
Issue Date
1999-05
Citation
제6회 광전자공학학술회의, ThB1, p103, 광주과학기술원, 1999년 5월
Abstract
We have fabricated optical waveguide using intermixing of InGaAs/InGaAsP multi-quantum well (MQW) structure. As-grown epi layer had very large absorption coefficient at the wavelength of 1.55㎛, however, after intermixing of the MQW the propagation loss has greatly reduced. Intermixing was done by heat treatment after deposition of SiO2 dielectric material on the sample and the optical waveguide was made by reactive ion etching using CH4/H2 mixture. For the waveguide after 800℃, 30sec heat treatment, the measured propagation loss was 3.76dB/cm and 3.95dB/cm for TE and TM mode respectively.
Language
Korean
URI
http://hdl.handle.net/10371/7536
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Others_전기·정보공학부
  • mendeley

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