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Properties of the doped polycrystalline silicon as site material for the micromachined silicon neural probe

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Authors
Oh, Seung Jae; Song, Jong Keun; An, Soon Kwan; Kim, Sung June
Issue Date
2003-01
Publisher
Springer Verlag
Citation
J. Mater. Sci. Lett. 22(2) (2003) 131
ISSN
0261-8028 (print)
1573-4811 (online)
Language
English
URI
http://hdl.handle.net/10371/7847
DOI
https://doi.org/10.1023/A:1021866920811
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Journal Papers (저널논문_전기·정보공학부)
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