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Properties of the doped polycrystalline silicon as site material for the micromachined silicon neural probe

Cited 5 time in Web of Science Cited 5 time in Scopus
Authors

Oh, Seung Jae; Song, Jong Keun; An, Soon Kwan; Kim, Sung June

Issue Date
2003-01
Publisher
Springer Verlag
Citation
J. Mater. Sci. Lett. 22(2) (2003) 131
ISSN
0261-8028 (print)
1573-4811 (online)
Language
English
URI
https://hdl.handle.net/10371/7847
DOI
https://doi.org/10.1023/A:1021866920811
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