Neural signal recording using microelectrode arrays fabricated on liquid crystal polymer material

Abstract

Microelectrode arrays have been developed for simultaneous multi-channel recordings from nervous systems, typically using silicon substrates. However, it has been known that it is difficult to meet the biocompatibility and durability requirements using silicon and other dielectric materials (SiO2, Si3N4), due to environmental moisture and ions. Additional disadvantage of silicon being the rigid material makes it hard to apply these materials in chronic recording situations. Liquid Crystal Polymer (LCP) was recently introduced as a candidate material for electronic packaging purposes. The material acts as efficient barrier against ions and moisture, a desirable feature for a substrate material of microelectrode arrays. In this paper, we report on the neural recording performed using the LCP-based microelectrode arrays. The cell adhesion on the new material was compared very favorably with that using silicon, SiO2, or polyimide material. The microelectrode arrays were patterned with Ti (500 A ° )/Au (3500 A ° ) on the LCP film and were employed in both stimulation and recording from rat sciatic nerve. The electrical characteristic of the recorded signal was as good as those using other substrate materials, proving this material as an excellent candidate for next generation microelectrode arrays.