SHERP

Neural Interface with a Silicon Neural Probe in the Advancement of Microtechnology

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Authors
Oh, Seung Jae; Song, Jong Keun; Kim, Sung June
Issue Date
2003-08
Publisher
Springer Verlag;
한국생물공학회 = The Korean Society for Biotechnology and Bioengineering
Citation
Biotechnol. Bioprocess Eng. 8: 252-256
Keywords
silicon neural probeneural prosthesisneural recordingneural interface
Abstract
In this paper we describe the status of a silicon-based microelectrode for neural recording and an advanced neural interface. We have developed a silicon neural probe, using a combination of plasma and wet etching techniques. This process enables the probe thickness to be controlled precisely. To enhance the CMOS compatibility in the fabrication process, we investigated the feasibility of the site material of the doped polycrystalline silicon with small grains of around 50 nm in size. This silicon electrode demonstrated a favorable performance with respect to impedance spectra, surface topography and acute neural recording. These results showed that the silicon neural probe can be used as an advanced microelectrode for neurological applications.
ISSN
1226-8372 (print)
1976-3816 (online)
Language
English
URI
http://hdl.handle.net/10371/8908
DOI
https://doi.org/10.1007/BF02942274
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Journal Papers (저널논문_전기·정보공학부)
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