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Neural Interface with a Silicon Neural Probe in the Advancement of Microtechnology
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Oh, Seung Jae | - |
dc.contributor.author | Song, Jong Keun | - |
dc.contributor.author | Kim, Sung June | - |
dc.date.accessioned | 2009-09-08T03:54:19Z | - |
dc.date.available | 2009-09-08T03:54:19Z | - |
dc.date.issued | 2003-08 | - |
dc.identifier.citation | Biotechnol. Bioprocess Eng. 8: 252-256 | en |
dc.identifier.issn | 1226-8372 (print) | - |
dc.identifier.issn | 1976-3816 (online) | - |
dc.identifier.uri | https://hdl.handle.net/10371/8908 | - |
dc.description.abstract | In this paper we describe the status of a silicon-based microelectrode for neural recording and an advanced neural interface. We have developed a silicon neural probe, using a combination of plasma and wet etching techniques. This process enables the probe thickness to be controlled precisely. To enhance the CMOS compatibility in the fabrication process, we investigated the feasibility of the site material of the doped polycrystalline silicon with small grains of around 50 nm in size. This silicon electrode demonstrated a favorable performance with respect to impedance spectra, surface topography and acute neural recording. These results showed that the silicon neural probe can be used as an advanced microelectrode for neurological applications. | en |
dc.description.sponsorship | This research was supported by Nano Bioelectronics and System Research Center (NBS-ERC). KOSEF | en |
dc.language.iso | en | - |
dc.publisher | Springer Verlag | en |
dc.publisher | 한국생물공학회 = The Korean Society for Biotechnology and Bioengineering | - |
dc.subject | silicon neural probe | en |
dc.subject | neural prosthesis | en |
dc.subject | neural recording | en |
dc.subject | neural interface | en |
dc.title | Neural Interface with a Silicon Neural Probe in the Advancement of Microtechnology | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 오승재 | - |
dc.contributor.AlternativeAuthor | 송종근 | - |
dc.contributor.AlternativeAuthor | 김성준 | - |
dc.identifier.doi | 10.1007/BF02942274 | - |
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