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Characteristics of Intermixed InGaAs/InGaAsP Multi-Quantum-Well Structure

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Authors
Yeo, Deok Ho; Yoon, Kyung Hun; Kim, Sung June
Issue Date
2000-03
Publisher
Japan Society of Applied Physics
Citation
Jpn. J. Appl. Phys. 39 (2000) 1032
Keywords
InGaAs/InGaAsP multi-quantum-wellquantum well intermixingphotoluminescencesecondary ion mass spectroscopyoptical waveguide
Abstract
The intermixing of a InGaAs/InGaAsP multi-quantum-well (MQW) structure induced by SiO2 dielectric cap layer deposition and heat treatment was investigated. Photoluminescence experiments reveal a large blue shift of the effective bandgap for the intermixed quantum well. By secondary ion mass spectroscopy, the group III and V elements of a MQW are found to interdiffuse at a similar rate after the intermixing process. An optical waveguide was fabricated using intermixed material where a propagation loss reduction of 450 dB was recorded at a wavelength close to the original bandgap wavelength.
ISSN
0021-4922 (print)
1347-4065 (online)
Language
English
URI
http://hdl.handle.net/10371/8948
DOI
https://doi.org/10.1143/JJAP.39.1032
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Journal Papers (저널논문_전기·정보공학부)
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