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Fabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithography

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Authors
Kwak, Rhokyun; Jeong, Hoon Eui; Suh, Kahp Y.
Issue Date
2009-04-06
Publisher
Wiley-Blackwell
Citation
Small 2009, 5, 790
Keywords
bridge structurescapillaritycuringlithographyPOLYMERSMICROSTRUCTURESSURFACESARRAYSOXYGEN
Abstract
Bridging the gap: Vacuum-assisted capillary force lithography (CFL) allows the fabrication of monolithic, suspended bridge structures (see picture) by exploiting partial curing kinetics and vacuum-assisted hydraulic filling. A small portion of the base microstructure (<4 µm) is molded to create a bridge structure by simply applying a nanoscale mold with the impression of channels, meshes, or circles.
ISSN
1613-6810
Language
English
URI
http://hdl.handle.net/10371/9541
DOI
https://doi.org/10.1002/smll.200900219
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Journal Papers (저널논문_기계항공공학부)
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