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Fabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithography

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dc.contributor.authorKwak, Rhokyun-
dc.contributor.authorJeong, Hoon Eui-
dc.contributor.authorSuh, Kahp Y.-
dc.date.accessioned2009-09-16T09:58:18Z-
dc.date.available2009-09-16T09:58:18Z-
dc.date.issued2009-04-06-
dc.identifier.citationSmall 2009, 5, 790en
dc.identifier.issn1613-6810-
dc.identifier.urihttps://hdl.handle.net/10371/9541-
dc.description.abstractBridging the gap: Vacuum-assisted capillary force lithography (CFL) allows the fabrication of monolithic, suspended bridge structures (see picture) by exploiting partial curing kinetics and vacuum-assisted hydraulic filling. A small portion of the base microstructure (<4 µm) is molded to create a bridge structure by simply applying a nanoscale mold with the impression of channels, meshes, or circles.en
dc.description.sponsorshipThis work was supported by the Korea Science and Engineering Foundation (KOSEF) grant funded by the Korean government (MOST) (R01-2007-000-20675-0), the King Abdullah University of Science and Technology (KAUST) program (No. KUK-F1-037-02), and the Korea Research Foundation Grant funded by the
Korean Government (MOEHRD) (Grant KRF-J03000). This work was supported in part by the Center for Nanoscale Mechatronics &
Manufacturing (Grant 08K1401-00210) and the Grant-in-Aid for Strategy Technology Development Programs from the Korean
Ministry of Knowledge Economy (No.10030046).
en
dc.language.isoenen
dc.publisherWiley-Blackwellen
dc.subjectbridge structuresen
dc.subjectcapillarityen
dc.subjectcuringen
dc.subjectlithographyen
dc.subjectPOLYMERSen
dc.subjectMICROSTRUCTURESen
dc.subjectSURFACESen
dc.subjectARRAYSen
dc.subjectOXYGENen
dc.titleFabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithographyen
dc.typeArticleen
dc.contributor.AlternativeAuthor곽노균-
dc.contributor.AlternativeAuthor정훈의-
dc.contributor.AlternativeAuthor서갑양-
dc.identifier.doi10.1002/smll.200900219-
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