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Issue Date | Title / Author(s) / Citation | File | Altmetrics |
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2004 | Damascene Cu electrodeposition on metal organic chemical vapor deposition-grown Ru thin film barrier J. Vac. Sci. Technol. B 22, 2649 (2004) | DOI | |
2004-05 | Journal of Vacuum Science and Technology a Vacuum Surfaces and Films 22(4), 1120-1123 | DOI |
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