S-Space

Browse

Author

Showing results 1 to 1 of 1

Issue Date	Title / Author(s) / Citation	File	Altmetrics
2005-08	Effect of Organic Additives on Ceria Slurry in Shallow Trench Isolation Chemical Mechanical Planarization Kang, Min Cheol; Kim, Jae Jeong; Moon, Doo-Kyung Japanese Journal of Applied Physics 44(2005) 5949–5952	DOI