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Showing results 1 to 9 of 9
Issue Date
Title / Author(s) / Citation
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2004
원자층 증착법을 이용한 반도체 구리배선을 위한 WNxCy 확산방지막의 특성 분석에 관한 연구
오수석
link
2004
Hf(O-iPr)4 전구체와 O2를 이용한 HfO2 박막의 원자층 증착
김정찬
link
2009
Fabrication of nanopores and nanochannels for ionic field effect transistors
남성욱
link
2011-02
원자층 증착 방법을 이용한 ZnO 나노 튜브 제작 및 고성능 가스 센서로서의 응용
조성권
link
2014-08
Characterization of atomic layer deposited HfO2 and TiO2 high-k dielectrics on Si and Ge substrates
이상영
view file
2015-02
Electrical and thermal transport properties of atomic layer deposited Al-doped ZnO films
정기용
view file
2015-08
Study on the surface modification of submicron gadolinium-doped ceria electrolyte on nanoporous substrate using atomic layer deposition technique
지상훈
view file
2019-08
Studies on enhancement of stability and efficiency in next generation lithium–oxygen batteries
배영준
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link
2021
Modified atomic layer deposition processes of the Ru electrode thin films for next generation DRAM capacitor
권대선
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link
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